We have compiled a list of manufacturers, distributors, product information, reference prices, and rankings for Film forming equipment.
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Film forming equipment Product List and Ranking from 4 Manufacturers, Suppliers and Companies

Film forming equipment Product List

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[Device Production Example] Film Formation Device

[Device Production Example] Film Formation Device

From design to after-service of the equipment! We can offer various equipment proposals.

We would like to introduce a case of the small batch-type sputtering device "SPB-311" developed as a film-forming apparatus. It features a clean exhaust system with a cryopump as the main pump and is equipped with a magnetron cathode. It allows for the selection of RF/DC power supplies. Shinano Seiki supports the entire lifecycle of the device, from design to after-sales service, through collaboration with partner companies. 【Main Specifications】 ■ Clean exhaust system with a cryopump as the main pump ■ Equipped with a magnetron cathode (up to 3 units) ■ Selection of RF/DC power supplies available ■ Substrate rotation mechanism ■ Fully automatic touch panel sequence with manual operation available *For more details, please download the PDF or feel free to contact us.

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  • Sputtering Equipment

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Film-forming device "Corial 200 Series"

Film-forming device "Corial 200 Series"

A plasma etching and deposition device that can be configured according to its purpose.

We would like to introduce our "Corial 200 Series." This research and development equipment utilizes a common platform and can be configured as RIE, ICP, ICP+RIE, ICP-CVD, or PECVD depending on the application. Wafer sizes are 50mm, 100mm, 150mm, and 200mm. 【Features】 ■ Utilizes a common platform ■ RIE, ICP, ICP+RIE, ICP-CVD, or PECVD equipment ■ Designed for research and development ■ Wafer sizes are 50mm, 100mm, 150mm, and 200mm * You can download the English version of the catalog. * For more details, please refer to the PDF document or feel free to contact us.

  • Etching Equipment

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Film-forming device "Roll Coater"

Film-forming device "Roll Coater"

Achieving drumless flat web transport and non-contact transport of the processing surface before film formation! Film formation can utilize multi-process methods such as plasma CDV and sputtering.

The "Roll Coater" is a device that continuously performs surface treatment on plastic films, metal films, and the like. It enables drumless flat web transport and non-contact transport of the treatment surface before film formation, and the film formation can utilize a multi-process that combines methods such as plasma CDV, sputtering, and vacuum deposition. Additionally, a TMP + CRT exhaust system has been adopted to address the outgassing of material rolls. 【Features】 ■ Drumless flat web transport is possible ■ Non-contact transport of the treatment surface before film formation is possible ■ Multi-process capability ■ Adoption of TMP + CRT exhaust system *For more details, please refer to the catalog or feel free to contact us.

  • Coater

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